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Ferroelectric dielectrics integrated on silicon
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies.After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book empha...
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| Lenguaje: | eng |
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Wiley-ISTE
2013
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| Acceso en línea: | http://cds.cern.ch/record/1616863 |