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Nanofabrication by ion-beam sputtering: fundamentals and applications
Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on ve...
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| Lenguaje: | eng |
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CRC Press
2012
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| Acceso en línea: | http://cds.cern.ch/record/1616902 |