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Nano lithography
Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...
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| Lenguaje: | eng |
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Wiley-ISTE
2013
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| Acceso en línea: | http://cds.cern.ch/record/1617140 |