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Ion implantation science and technology
Ion Implantation Science and Technology
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Elsevier
1984
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1617235 |
| _version_ | 1780932727814488064 |
|---|---|
| author | Ziegler, JF |
| author_facet | Ziegler, JF |
| author_sort | Ziegler, JF |
| collection | CERN |
| description | Ion Implantation Science and Technology |
| id | cern-1617235 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1984 |
| publisher | Elsevier |
| record_format | invenio |
| spelling | cern-16172352021-04-21T22:03:08Zhttp://cds.cern.ch/record/1617235engZiegler, JFIon implantation science and technologyChemical Physics and ChemistryIon Implantation Science and TechnologyElsevieroai:cds.cern.ch:16172351984 |
| spellingShingle | Chemical Physics and Chemistry Ziegler, JF Ion implantation science and technology |
| title | Ion implantation science and technology |
| title_full | Ion implantation science and technology |
| title_fullStr | Ion implantation science and technology |
| title_full_unstemmed | Ion implantation science and technology |
| title_short | Ion implantation science and technology |
| title_sort | ion implantation science and technology |
| topic | Chemical Physics and Chemistry |
| url | http://cds.cern.ch/record/1617235 |
| work_keys_str_mv | AT zieglerjf ionimplantationscienceandtechnology |