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Ion implantation science and technology
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Academic Press
1988
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1619142 |
| _version_ | 1780932981494382592 |
|---|---|
| author | Ziegler, JF |
| author_facet | Ziegler, JF |
| author_sort | Ziegler, JF |
| collection | CERN |
| id | cern-1619142 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1988 |
| publisher | Academic Press |
| record_format | invenio |
| spelling | cern-16191422021-04-21T21:56:37Zhttp://cds.cern.ch/record/1619142engZiegler, JFIon implantation science and technologyChemical Physics and ChemistryAcademic Pressoai:cds.cern.ch:16191421988 |
| spellingShingle | Chemical Physics and Chemistry Ziegler, JF Ion implantation science and technology |
| title | Ion implantation science and technology |
| title_full | Ion implantation science and technology |
| title_fullStr | Ion implantation science and technology |
| title_full_unstemmed | Ion implantation science and technology |
| title_short | Ion implantation science and technology |
| title_sort | ion implantation science and technology |
| topic | Chemical Physics and Chemistry |
| url | http://cds.cern.ch/record/1619142 |
| work_keys_str_mv | AT zieglerjf ionimplantationscienceandtechnology |