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Fundamental electron interactions with plasma processing gases
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2004
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4419-8971-0 http://cds.cern.ch/record/1622600 |
| _version_ | 1780933272475271168 |
|---|---|
| author | Christophorou, Loucas G Olthoff, James K |
| author_facet | Christophorou, Loucas G Olthoff, James K |
| author_sort | Christophorou, Loucas G |
| collection | CERN |
| id | cern-1622600 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2004 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16226002021-04-21T21:50:18Zdoi:10.1007/978-1-4419-8971-0http://cds.cern.ch/record/1622600engChristophorou, Loucas GOlthoff, James KFundamental electron interactions with plasma processing gasesGeneral Theoretical PhysicsSpringeroai:cds.cern.ch:16226002004 |
| spellingShingle | General Theoretical Physics Christophorou, Loucas G Olthoff, James K Fundamental electron interactions with plasma processing gases |
| title | Fundamental electron interactions with plasma processing gases |
| title_full | Fundamental electron interactions with plasma processing gases |
| title_fullStr | Fundamental electron interactions with plasma processing gases |
| title_full_unstemmed | Fundamental electron interactions with plasma processing gases |
| title_short | Fundamental electron interactions with plasma processing gases |
| title_sort | fundamental electron interactions with plasma processing gases |
| topic | General Theoretical Physics |
| url | https://dx.doi.org/10.1007/978-1-4419-8971-0 http://cds.cern.ch/record/1622600 |
| work_keys_str_mv | AT christophorouloucasg fundamentalelectroninteractionswithplasmaprocessinggases AT olthoffjamesk fundamentalelectroninteractionswithplasmaprocessinggases |