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Fundamental electron interactions with plasma processing gases

Detalles Bibliográficos
Autores principales:	Christophorou, Loucas G, Olthoff, James K
Lenguaje:	eng
Publicado:	Springer 2004
Materias:	General Theoretical Physics
Acceso en línea:	https://dx.doi.org/10.1007/978-1-4419-8971-0 http://cds.cern.ch/record/1622600

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