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Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Springer
1987
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-3-642-83136-2 http://cds.cern.ch/record/1624635 |
| _version_ | 1780933516463177728 |
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| author | Boyd, Ian W |
| author_facet | Boyd, Ian W |
| author_sort | Boyd, Ian W |
| collection | CERN |
| id | cern-1624635 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1987 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16246352021-04-21T21:45:16Zdoi:10.1007/978-3-642-83136-2http://cds.cern.ch/record/1624635engBoyd, Ian WLaser processing of thin films and microstructures: oxidation, deposition and etching of insulatorsEngineeringSpringeroai:cds.cern.ch:16246351987 |
| spellingShingle | Engineering Boyd, Ian W Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators |
| title | Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators |
| title_full | Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators |
| title_fullStr | Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators |
| title_full_unstemmed | Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators |
| title_short | Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators |
| title_sort | laser processing of thin films and microstructures: oxidation, deposition and etching of insulators |
| topic | Engineering |
| url | https://dx.doi.org/10.1007/978-3-642-83136-2 http://cds.cern.ch/record/1624635 |
| work_keys_str_mv | AT boydianw laserprocessingofthinfilmsandmicrostructuresoxidationdepositionandetchingofinsulators |