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Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators

Detalles Bibliográficos
Autor principal:	Boyd, Ian W
Lenguaje:	eng
Publicado:	Springer 1987
Materias:	Engineering
Acceso en línea:	https://dx.doi.org/10.1007/978-3-642-83136-2 http://cds.cern.ch/record/1624635

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