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Film deposition by plasma techniques
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Springer
1992
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-3-642-84511-6 http://cds.cern.ch/record/1624663 |
| _version_ | 1780933522304794624 |
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| author | Konuma, Mitsuharu |
| author_facet | Konuma, Mitsuharu |
| author_sort | Konuma, Mitsuharu |
| collection | CERN |
| id | cern-1624663 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1992 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16246632021-04-21T21:45:07Zdoi:10.1007/978-3-642-84511-6http://cds.cern.ch/record/1624663engKonuma, MitsuharuFilm deposition by plasma techniquesGeneral Theoretical PhysicsSpringeroai:cds.cern.ch:16246631992 |
| spellingShingle | General Theoretical Physics Konuma, Mitsuharu Film deposition by plasma techniques |
| title | Film deposition by plasma techniques |
| title_full | Film deposition by plasma techniques |
| title_fullStr | Film deposition by plasma techniques |
| title_full_unstemmed | Film deposition by plasma techniques |
| title_short | Film deposition by plasma techniques |
| title_sort | film deposition by plasma techniques |
| topic | General Theoretical Physics |
| url | https://dx.doi.org/10.1007/978-3-642-84511-6 http://cds.cern.ch/record/1624663 |
| work_keys_str_mv | AT konumamitsuharu filmdepositionbyplasmatechniques |