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Film deposition by plasma techniques

Detalles Bibliográficos
Autor principal:	Konuma, Mitsuharu
Lenguaje:	eng
Publicado:	Springer 1992
Materias:	General Theoretical Physics
Acceso en línea:	https://dx.doi.org/10.1007/978-3-642-84511-6 http://cds.cern.ch/record/1624663

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