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Ellipsometry for industrial applications
Autor principal: | |
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Lenguaje: | eng |
Publicado: |
Springer
1988
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1007/978-3-7091-8961-0 http://cds.cern.ch/record/1625089 |
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author | Riedling, Karl |
author_facet | Riedling, Karl |
author_sort | Riedling, Karl |
collection | CERN |
id | cern-1625089 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1988 |
publisher | Springer |
record_format | invenio |
spelling | cern-16250892021-04-21T21:42:43Zdoi:10.1007/978-3-7091-8961-0http://cds.cern.ch/record/1625089engRiedling, KarlEllipsometry for industrial applicationsGeneral Theoretical PhysicsSpringeroai:cds.cern.ch:16250891988 |
spellingShingle | General Theoretical Physics Riedling, Karl Ellipsometry for industrial applications |
title | Ellipsometry for industrial applications |
title_full | Ellipsometry for industrial applications |
title_fullStr | Ellipsometry for industrial applications |
title_full_unstemmed | Ellipsometry for industrial applications |
title_short | Ellipsometry for industrial applications |
title_sort | ellipsometry for industrial applications |
topic | General Theoretical Physics |
url | https://dx.doi.org/10.1007/978-3-7091-8961-0 http://cds.cern.ch/record/1625089 |
work_keys_str_mv | AT riedlingkarl ellipsometryforindustrialapplications |