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The physics of submicron lithography
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Springer
1992
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4615-3318-4 http://cds.cern.ch/record/1626347 |
| _version_ | 1780933745277140992 |
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| author | Valiev, Kamil A |
| author_facet | Valiev, Kamil A |
| author_sort | Valiev, Kamil A |
| collection | CERN |
| id | cern-1626347 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1992 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16263472021-04-21T21:40:39Zdoi:10.1007/978-1-4615-3318-4http://cds.cern.ch/record/1626347engValiev, Kamil AThe physics of submicron lithographyGeneral Theoretical PhysicsSpringeroai:cds.cern.ch:16263471992 |
| spellingShingle | General Theoretical Physics Valiev, Kamil A The physics of submicron lithography |
| title | The physics of submicron lithography |
| title_full | The physics of submicron lithography |
| title_fullStr | The physics of submicron lithography |
| title_full_unstemmed | The physics of submicron lithography |
| title_short | The physics of submicron lithography |
| title_sort | physics of submicron lithography |
| topic | General Theoretical Physics |
| url | https://dx.doi.org/10.1007/978-1-4615-3318-4 http://cds.cern.ch/record/1626347 |
| work_keys_str_mv | AT valievkamila thephysicsofsubmicronlithography AT valievkamila physicsofsubmicronlithography |