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The physics of submicron lithography

Detalles Bibliográficos
Autor principal:	Valiev, Kamil A
Lenguaje:	eng
Publicado:	Springer 1992
Materias:	General Theoretical Physics
Acceso en línea:	https://dx.doi.org/10.1007/978-1-4615-3318-4 http://cds.cern.ch/record/1626347

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