Cargando…
Ion implantation in semiconductors: science and technology
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Springer
1975
|
| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4684-2151-4 http://cds.cern.ch/record/1626500 |
| _version_ | 1780933777041653760 |
|---|---|
| author | Namba, Susumu |
| author_facet | Namba, Susumu |
| author_sort | Namba, Susumu |
| collection | CERN |
| id | cern-1626500 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1975 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16265002021-04-21T21:39:49Zdoi:10.1007/978-1-4684-2151-4http://cds.cern.ch/record/1626500engNamba, SusumuIon implantation in semiconductors: science and technologyGeneral Theoretical PhysicsSpringeroai:cds.cern.ch:16265001975 |
| spellingShingle | General Theoretical Physics Namba, Susumu Ion implantation in semiconductors: science and technology |
| title | Ion implantation in semiconductors: science and technology |
| title_full | Ion implantation in semiconductors: science and technology |
| title_fullStr | Ion implantation in semiconductors: science and technology |
| title_full_unstemmed | Ion implantation in semiconductors: science and technology |
| title_short | Ion implantation in semiconductors: science and technology |
| title_sort | ion implantation in semiconductors: science and technology |
| topic | General Theoretical Physics |
| url | https://dx.doi.org/10.1007/978-1-4684-2151-4 http://cds.cern.ch/record/1626500 |
| work_keys_str_mv | AT nambasusumu ionimplantationinsemiconductorsscienceandtechnology |