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Ion implantation in semiconductors: science and technology

Detalles Bibliográficos
Autor principal:	Namba, Susumu
Lenguaje:	eng
Publicado:	Springer 1975
Materias:	General Theoretical Physics
Acceso en línea:	https://dx.doi.org/10.1007/978-1-4684-2151-4 http://cds.cern.ch/record/1626500

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