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NATO Advanced Study Institute on Reduced Thermal Processing for ULSI
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Springer
1990
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4613-0541-5 http://cds.cern.ch/record/1630595 |
| _version_ | 1780934205525458944 |
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| author | Levy, Roland |
| author_facet | Levy, Roland |
| author_sort | Levy, Roland |
| collection | CERN |
| id | cern-1630595 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1990 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16305952021-04-25T16:51:39Zdoi:10.1007/978-1-4613-0541-5http://cds.cern.ch/record/1630595engLevy, RolandNATO Advanced Study Institute on Reduced Thermal Processing for ULSIOther Fields of PhysicsSpringeroai:cds.cern.ch:16305951990 |
| spellingShingle | Other Fields of Physics Levy, Roland NATO Advanced Study Institute on Reduced Thermal Processing for ULSI |
| title | NATO Advanced Study Institute on Reduced Thermal Processing for ULSI |
| title_full | NATO Advanced Study Institute on Reduced Thermal Processing for ULSI |
| title_fullStr | NATO Advanced Study Institute on Reduced Thermal Processing for ULSI |
| title_full_unstemmed | NATO Advanced Study Institute on Reduced Thermal Processing for ULSI |
| title_short | NATO Advanced Study Institute on Reduced Thermal Processing for ULSI |
| title_sort | nato advanced study institute on reduced thermal processing for ulsi |
| topic | Other Fields of Physics |
| url | https://dx.doi.org/10.1007/978-1-4613-0541-5 http://cds.cern.ch/record/1630595 |
| work_keys_str_mv | AT levyroland natoadvancedstudyinstituteonreducedthermalprocessingforulsi |