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Semiconductor devices: physics and technology
Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Wiley
2012
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1632394 |
| _version_ | 1780934386744557568 |
|---|---|
| author | Sze, Simon Lee, Ming-Kwei |
| author_facet | Sze, Simon Lee, Ming-Kwei |
| author_sort | Sze, Simon |
| collection | CERN |
| description | Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices. |
| id | cern-1632394 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2012 |
| publisher | Wiley |
| record_format | invenio |
| spelling | cern-16323942021-04-21T21:32:20Zhttp://cds.cern.ch/record/1632394engSze, SimonLee, Ming-KweiSemiconductor devices: physics and technologyEngineeringSemiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.Wileyoai:cds.cern.ch:16323942012 |
| spellingShingle | Engineering Sze, Simon Lee, Ming-Kwei Semiconductor devices: physics and technology |
| title | Semiconductor devices: physics and technology |
| title_full | Semiconductor devices: physics and technology |
| title_fullStr | Semiconductor devices: physics and technology |
| title_full_unstemmed | Semiconductor devices: physics and technology |
| title_short | Semiconductor devices: physics and technology |
| title_sort | semiconductor devices: physics and technology |
| topic | Engineering |
| url | http://cds.cern.ch/record/1632394 |
| work_keys_str_mv | AT szesimon semiconductordevicesphysicsandtechnology AT leemingkwei semiconductordevicesphysicsandtechnology |