Cargando…

Ion implantation and activation

Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories.Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory,...

Descripción completa

Detalles Bibliográficos
Autor principal: Suzuki, Kunihiro
Lenguaje:eng
Publicado: Bentham Science Publ. 2013
Materias:
Acceso en línea:http://cds.cern.ch/record/1633778