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Ion implantation and activation
Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories.Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory,...
Autor principal: | Suzuki, Kunihiro |
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Lenguaje: | eng |
Publicado: |
Bentham Science Publ.
2013
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/1633778 |
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