Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India

This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor with different width and pitch combinations on a sing...

Descripción completa

Detalles Bibliográficos
Autores principales: Aziz, T, Chendvankar, S.R., Mohanty, G.B., Patil, M.R., Rao, K.K., Rani, Y.R., Rao, Y.P.P., Behnamian, H., Mersi, S., Naseri, M.
Lenguaje:eng
Publicado: 2014
Materias:
Detectors and Experimental Techniques
Acceso en línea:https://dx.doi.org/10.1088/1748-0221/9/06/P06008
http://cds.cern.ch/record/1647705
_version_ 1780935152065576960
author Aziz, T
Chendvankar, S.R.
Mohanty, G.B.
Patil, M.R.
Rao, K.K.
Rani, Y.R.
Rao, Y.P.P.
Behnamian, H.
Mersi, S.
Naseri, M.
author_facet Aziz, T
Chendvankar, S.R.
Mohanty, G.B.
Patil, M.R.
Rao, K.K.
Rani, Y.R.
Rao, Y.P.P.
Behnamian, H.
Mersi, S.
Naseri, M.
author_sort Aziz, T
collection CERN
description This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor with different width and pitch combinations on a single 4-inch wafer. After finding test procedures for characterizing these AC coupled sensors, we have chosen an optimal width-pitch combination and also fine-tuned various process parameters in order to produce sensors with the desired specifications.
id cern-1647705
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2014
record_format invenio
spelling cern-16477052019-09-30T06:29:59Zdoi:10.1088/1748-0221/9/06/P06008http://cds.cern.ch/record/1647705engAziz, TChendvankar, S.R.Mohanty, G.B.Patil, M.R.Rao, K.K.Rani, Y.R.Rao, Y.P.P.Behnamian, H.Mersi, S.Naseri, M.Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in IndiaDetectors and Experimental TechniquesThis paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor with different width and pitch combinations on a single 4-inch wafer. After finding test procedures for characterizing these AC coupled sensors, we have chosen an optimal width-pitch combination and also fine-tuned various process parameters in order to produce sensors with the desired specifications.arXiv:1402.2406oai:cds.cern.ch:16477052014-02-11
spellingShingle Detectors and Experimental Techniques
Aziz, T
Chendvankar, S.R.
Mohanty, G.B.
Patil, M.R.
Rao, K.K.
Rani, Y.R.
Rao, Y.P.P.
Behnamian, H.
Mersi, S.
Naseri, M.
Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
title Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
title_full Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
title_fullStr Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
title_full_unstemmed Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
title_short Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
title_sort design, fabrication and characterization of the first ac-coupled silicon microstrip sensors in india
topic Detectors and Experimental Techniques
url https://dx.doi.org/10.1088/1748-0221/9/06/P06008
http://cds.cern.ch/record/1647705
work_keys_str_mv AT azizt designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT chendvankarsr designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT mohantygb designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT patilmr designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT raokk designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT raniyr designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT raoypp designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT behnamianh designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT mersis designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia
AT naserim designfabricationandcharacterizationofthefirstaccoupledsiliconmicrostripsensorsinindia

Ejemplares similares