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Atomic layer deposition of nanostructured materials
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfectio...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Wiley
2012
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1706463 |