Cargando…

LePix-A high resistivity, fully depleted monolithic pixel detector

The LePix project explores monolithic pixel sensors fabricated in a 90 nm CMOS technology built over a lightly doped substrate. This approach keeps the advantages usually offered by Monolithic Active Pixel Sensors (MAPS), like a low input capacitance, having a single piece detector and using a stand...

Descripción completa

Detalles Bibliográficos
Autores principales: Giubilato, P, Tindall, C, Mugnier, H, Bisello, D, Marchioro, A, Snoeys, W, Denes, P, Pantano, D, Rousset, J, Mattiazzo, S, Kloukinas, K, Potenza, A, Rivetti, A, Chalmet, P
Lenguaje:eng
Publicado: 2013
Materias:
Acceso en línea:https://dx.doi.org/10.1016/j.nima.2013.05.189
http://cds.cern.ch/record/1711743
_version_ 1780936740702257152
author Giubilato, P
Tindall, C
Mugnier, H
Bisello, D
Marchioro, A
Snoeys, W
Denes, P
Pantano, D
Rousset, J
Mattiazzo, S
Kloukinas, K
Potenza, A
Rivetti, A
Chalmet, P
author_facet Giubilato, P
Tindall, C
Mugnier, H
Bisello, D
Marchioro, A
Snoeys, W
Denes, P
Pantano, D
Rousset, J
Mattiazzo, S
Kloukinas, K
Potenza, A
Rivetti, A
Chalmet, P
author_sort Giubilato, P
collection CERN
description The LePix project explores monolithic pixel sensors fabricated in a 90 nm CMOS technology built over a lightly doped substrate. This approach keeps the advantages usually offered by Monolithic Active Pixel Sensors (MAPS), like a low input capacitance, having a single piece detector and using a standard CMOS production line, and adds the benefit of charge collection by drift from a depleted region several tens of microns deep into the substrate, therefore providing an excellent signal to noise ratio and a radiation tolerance superior to conventional un-depleted MAPS. Such sensors are expected to offer significant cost savings and reduction of power consumption for the same performance, leading to the use of much less material in the detector (less cooling and less copper), addressing one of the main limitations of present day particle tracking systems. The latest evolution of the project uses detectors thinned down to 50 mu m to obtain back illuminated sensors operated in full depletion mode. By back processing the chip and collecting the charge from the full substrate it is hence possible to efficiently detect soft X-rays up to 10 keV. Test results from first successfully processed detectors will be presented and discussed. (C) 2013 Elsevier B.V. All rights reserved.
id cern-1711743
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2013
record_format invenio
spelling cern-17117432019-09-30T06:29:59Zdoi:10.1016/j.nima.2013.05.189http://cds.cern.ch/record/1711743engGiubilato, PTindall, CMugnier, HBisello, DMarchioro, ASnoeys, WDenes, PPantano, DRousset, JMattiazzo, SKloukinas, KPotenza, ARivetti, AChalmet, PLePix-A high resistivity, fully depleted monolithic pixel detectorDetectors and Experimental TechniquesNuclear Physics - ExperimentParticle Physics - TheoryThe LePix project explores monolithic pixel sensors fabricated in a 90 nm CMOS technology built over a lightly doped substrate. This approach keeps the advantages usually offered by Monolithic Active Pixel Sensors (MAPS), like a low input capacitance, having a single piece detector and using a standard CMOS production line, and adds the benefit of charge collection by drift from a depleted region several tens of microns deep into the substrate, therefore providing an excellent signal to noise ratio and a radiation tolerance superior to conventional un-depleted MAPS. Such sensors are expected to offer significant cost savings and reduction of power consumption for the same performance, leading to the use of much less material in the detector (less cooling and less copper), addressing one of the main limitations of present day particle tracking systems. The latest evolution of the project uses detectors thinned down to 50 mu m to obtain back illuminated sensors operated in full depletion mode. By back processing the chip and collecting the charge from the full substrate it is hence possible to efficiently detect soft X-rays up to 10 keV. Test results from first successfully processed detectors will be presented and discussed. (C) 2013 Elsevier B.V. All rights reserved.oai:cds.cern.ch:17117432013
spellingShingle Detectors and Experimental Techniques
Nuclear Physics - Experiment
Particle Physics - Theory
Giubilato, P
Tindall, C
Mugnier, H
Bisello, D
Marchioro, A
Snoeys, W
Denes, P
Pantano, D
Rousset, J
Mattiazzo, S
Kloukinas, K
Potenza, A
Rivetti, A
Chalmet, P
LePix-A high resistivity, fully depleted monolithic pixel detector
title LePix-A high resistivity, fully depleted monolithic pixel detector
title_full LePix-A high resistivity, fully depleted monolithic pixel detector
title_fullStr LePix-A high resistivity, fully depleted monolithic pixel detector
title_full_unstemmed LePix-A high resistivity, fully depleted monolithic pixel detector
title_short LePix-A high resistivity, fully depleted monolithic pixel detector
title_sort lepix-a high resistivity, fully depleted monolithic pixel detector
topic Detectors and Experimental Techniques
Nuclear Physics - Experiment
Particle Physics - Theory
url https://dx.doi.org/10.1016/j.nima.2013.05.189
http://cds.cern.ch/record/1711743
work_keys_str_mv AT giubilatop lepixahighresistivityfullydepletedmonolithicpixeldetector
AT tindallc lepixahighresistivityfullydepletedmonolithicpixeldetector
AT mugnierh lepixahighresistivityfullydepletedmonolithicpixeldetector
AT bisellod lepixahighresistivityfullydepletedmonolithicpixeldetector
AT marchioroa lepixahighresistivityfullydepletedmonolithicpixeldetector
AT snoeysw lepixahighresistivityfullydepletedmonolithicpixeldetector
AT denesp lepixahighresistivityfullydepletedmonolithicpixeldetector
AT pantanod lepixahighresistivityfullydepletedmonolithicpixeldetector
AT roussetj lepixahighresistivityfullydepletedmonolithicpixeldetector
AT mattiazzos lepixahighresistivityfullydepletedmonolithicpixeldetector
AT kloukinask lepixahighresistivityfullydepletedmonolithicpixeldetector
AT potenzaa lepixahighresistivityfullydepletedmonolithicpixeldetector
AT rivettia lepixahighresistivityfullydepletedmonolithicpixeldetector
AT chalmetp lepixahighresistivityfullydepletedmonolithicpixeldetector