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Fundamental principles of engineering nanometrology
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
William Andrew
2014
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1749354 |
| _version_ | 1780943051747753984 |
|---|---|
| author | Leach, R K |
| author_facet | Leach, R K |
| author_sort | Leach, R K |
| collection | CERN |
| id | cern-1749354 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2014 |
| publisher | William Andrew |
| record_format | invenio |
| spelling | cern-17493542021-04-21T20:54:40Zhttp://cds.cern.ch/record/1749354engLeach, R KFundamental principles of engineering nanometrologyEngineeringWilliam Andrewoai:cds.cern.ch:17493542014 |
| spellingShingle | Engineering Leach, R K Fundamental principles of engineering nanometrology |
| title | Fundamental principles of engineering nanometrology |
| title_full | Fundamental principles of engineering nanometrology |
| title_fullStr | Fundamental principles of engineering nanometrology |
| title_full_unstemmed | Fundamental principles of engineering nanometrology |
| title_short | Fundamental principles of engineering nanometrology |
| title_sort | fundamental principles of engineering nanometrology |
| topic | Engineering |
| url | http://cds.cern.ch/record/1749354 |
| work_keys_str_mv | AT leachrk fundamentalprinciplesofengineeringnanometrology |