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Metallization of ceramic vacuum chambers by magnetron sputtering
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
1988
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/191046 |
| _version_ | 1780881797532352512 |
|---|---|
| author | Kühn, H Zega, B |
| author_facet | Kühn, H Zega, B |
| author_sort | Kühn, H |
| collection | CERN |
| id | cern-191046 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1988 |
| record_format | invenio |
| spelling | cern-1910462023-05-19T15:36:46Zhttp://cds.cern.ch/record/191046engKühn, HZega, BMetallization of ceramic vacuum chambers by magnetron sputteringEngineeringCERN-SPS-88-13-ABToai:cds.cern.ch:1910461988 |
| spellingShingle | Engineering Kühn, H Zega, B Metallization of ceramic vacuum chambers by magnetron sputtering |
| title | Metallization of ceramic vacuum chambers by magnetron sputtering |
| title_full | Metallization of ceramic vacuum chambers by magnetron sputtering |
| title_fullStr | Metallization of ceramic vacuum chambers by magnetron sputtering |
| title_full_unstemmed | Metallization of ceramic vacuum chambers by magnetron sputtering |
| title_short | Metallization of ceramic vacuum chambers by magnetron sputtering |
| title_sort | metallization of ceramic vacuum chambers by magnetron sputtering |
| topic | Engineering |
| url | http://cds.cern.ch/record/191046 |
| work_keys_str_mv | AT kuhnh metallizationofceramicvacuumchambersbymagnetronsputtering AT zegab metallizationofceramicvacuumchambersbymagnetronsputtering |