Cargando…
The effect of heavy doping on complex formation and diffusivity of Sb in Si
| Autores principales: | , , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
1988
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/192086 |
| _version_ | 1780881829885116416 |
|---|---|
| author | Nylandsted-Larsen, A Tidemand-Petersson, P Andersen, P E Weyer, G |
| author_facet | Nylandsted-Larsen, A Tidemand-Petersson, P Andersen, P E Weyer, G |
| author_sort | Nylandsted-Larsen, A |
| collection | CERN |
| id | cern-192086 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1988 |
| record_format | invenio |
| spelling | cern-1920862019-09-30T06:29:59Zhttp://cds.cern.ch/record/192086engNylandsted-Larsen, ATidemand-Petersson, PAndersen, P EWeyer, GThe effect of heavy doping on complex formation and diffusivity of Sb in SiOther Fields of PhysicsCERN-EP-88-145oai:cds.cern.ch:1920861988-10-25 |
| spellingShingle | Other Fields of Physics Nylandsted-Larsen, A Tidemand-Petersson, P Andersen, P E Weyer, G The effect of heavy doping on complex formation and diffusivity of Sb in Si |
| title | The effect of heavy doping on complex formation and diffusivity of Sb in Si |
| title_full | The effect of heavy doping on complex formation and diffusivity of Sb in Si |
| title_fullStr | The effect of heavy doping on complex formation and diffusivity of Sb in Si |
| title_full_unstemmed | The effect of heavy doping on complex formation and diffusivity of Sb in Si |
| title_short | The effect of heavy doping on complex formation and diffusivity of Sb in Si |
| title_sort | effect of heavy doping on complex formation and diffusivity of sb in si |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/192086 |
| work_keys_str_mv | AT nylandstedlarsena theeffectofheavydopingoncomplexformationanddiffusivityofsbinsi AT tidemandpeterssonp theeffectofheavydopingoncomplexformationanddiffusivityofsbinsi AT andersenpe theeffectofheavydopingoncomplexformationanddiffusivityofsbinsi AT weyerg theeffectofheavydopingoncomplexformationanddiffusivityofsbinsi AT nylandstedlarsena effectofheavydopingoncomplexformationanddiffusivityofsbinsi AT tidemandpeterssonp effectofheavydopingoncomplexformationanddiffusivityofsbinsi AT andersenpe effectofheavydopingoncomplexformationanddiffusivityofsbinsi AT weyerg effectofheavydopingoncomplexformationanddiffusivityofsbinsi |