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The effect of heavy doping on complex formation and diffusivity of Sb in Si

Detalles Bibliográficos
Autores principales:	Nylandsted-Larsen, A, Tidemand-Petersson, P, Andersen, P E, Weyer, G
Lenguaje:	eng
Publicado:	1988
Materias:	Other Fields of Physics
Acceso en línea:	http://cds.cern.ch/record/192086

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