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Silicon-on-insulator (SOI) technology : manufacture and applications
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Woodhead Publ.
2014
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1951989 |
| _version_ | 1780944277106327552 |
|---|---|
| author | Kononchuk, Oleg Nguyen, Bich-Yen |
| author_facet | Kononchuk, Oleg Nguyen, Bich-Yen |
| author_sort | Kononchuk, Oleg |
| collection | CERN |
| id | cern-1951989 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2014 |
| publisher | Woodhead Publ. |
| record_format | invenio |
| spelling | cern-19519892021-04-21T20:53:09Zhttp://cds.cern.ch/record/1951989engKononchuk, OlegNguyen, Bich-Yen Silicon-on-insulator (SOI) technology : manufacture and applications EngineeringWoodhead Publ.oai:cds.cern.ch:19519892014 |
| spellingShingle | Engineering Kononchuk, Oleg Nguyen, Bich-Yen Silicon-on-insulator (SOI) technology : manufacture and applications |
| title |
Silicon-on-insulator (SOI) technology
:
manufacture and applications
|
| title_full |
Silicon-on-insulator (SOI) technology
:
manufacture and applications
|
| title_fullStr |
Silicon-on-insulator (SOI) technology
:
manufacture and applications
|
| title_full_unstemmed |
Silicon-on-insulator (SOI) technology
:
manufacture and applications
|
| title_short |
Silicon-on-insulator (SOI) technology
:
manufacture and applications
|
| title_sort | silicon-on-insulator (soi) technology
:
manufacture and applications |
| topic | Engineering |
| url | http://cds.cern.ch/record/1951989 |
| work_keys_str_mv | AT kononchukoleg silicononinsulatorsoitechnologymanufactureandapplications AT nguyenbichyen silicononinsulatorsoitechnologymanufactureandapplications |