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Reactive sputter deposition
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with rea...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2008
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1972930 |