Effect of Radiation on a Mach-Zehnder Interferometer Silicon Modulator for HL-LHC data Transmission Applications

High-speed Mach-Zehnder interferometer silicon modulators were irradiated with neutrons and X-rays in two separate radiation tests. The devices were exposed to a total fluence of 1.2 x 10$^{15}$ neutrons/cm$^2$ and a total ionizing dose of 1.3 MGy; levels comparable to the worst radiation levels for a tracking detector after 10 years of operation at the High- Luminosity LHC. Our measurements indicate that the devices performance does not significantly degrade after exposure to nonionizing radiation and begins to be affected by ionizing radiation after a dose of a few hundred kGy; the phase-shift for an applied reverse bias of 1 V is 10% of its pre-irradiated value after 600 kGy of received ionizing dose.