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Organometallic vapor-phase epitaxy: theory and practice
Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition...
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| Lenguaje: | eng |
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Academic Press
1989
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| Acceso en línea: | http://cds.cern.ch/record/1985514 |