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Handbook of optical dimensional metrology
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
CRC Press
2013
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1988938 |
| _version_ | 1780945625904316416 |
|---|---|
| author | Harding, Kevin G |
| author_facet | Harding, Kevin G |
| author_sort | Harding, Kevin G |
| collection | CERN |
| id | cern-1988938 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2013 |
| publisher | CRC Press |
| record_format | invenio |
| spelling | cern-19889382020-07-16T20:02:43Zhttp://cds.cern.ch/record/1988938engHarding, Kevin G Handbook of optical dimensional metrology Other Fields of PhysicsCRC Pressoai:cds.cern.ch:19889382013 |
| spellingShingle | Other Fields of Physics Harding, Kevin G Handbook of optical dimensional metrology |
| title |
Handbook of optical dimensional metrology
|
| title_full |
Handbook of optical dimensional metrology
|
| title_fullStr |
Handbook of optical dimensional metrology
|
| title_full_unstemmed |
Handbook of optical dimensional metrology
|
| title_short |
Handbook of optical dimensional metrology
|
| title_sort | handbook of optical dimensional metrology |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/1988938 |
| work_keys_str_mv | AT hardingkeving handbookofopticaldimensionalmetrology |