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Cw beam processing of silicon and other semiconductors
SEMICONDUCTORS & SEMIMETALS V17
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Academic Press
1984
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1990831 |
| _version_ | 1780945723376795648 |
|---|---|
| author | Gibson, James |
| author_facet | Gibson, James |
| author_sort | Gibson, James |
| collection | CERN |
| description | SEMICONDUCTORS & SEMIMETALS V17 |
| id | cern-1990831 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1984 |
| publisher | Academic Press |
| record_format | invenio |
| spelling | cern-19908312021-04-21T20:29:51Zhttp://cds.cern.ch/record/1990831engGibson, JamesCw beam processing of silicon and other semiconductorsChemical Physics and ChemistrySEMICONDUCTORS & SEMIMETALS V17Academic Pressoai:cds.cern.ch:19908311984 |
| spellingShingle | Chemical Physics and Chemistry Gibson, James Cw beam processing of silicon and other semiconductors |
| title | Cw beam processing of silicon and other semiconductors |
| title_full | Cw beam processing of silicon and other semiconductors |
| title_fullStr | Cw beam processing of silicon and other semiconductors |
| title_full_unstemmed | Cw beam processing of silicon and other semiconductors |
| title_short | Cw beam processing of silicon and other semiconductors |
| title_sort | cw beam processing of silicon and other semiconductors |
| topic | Chemical Physics and Chemistry |
| url | http://cds.cern.ch/record/1990831 |
| work_keys_str_mv | AT gibsonjames cwbeamprocessingofsiliconandothersemiconductors |