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Oxygen in silicon
This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions,...
| Autores principales: | , , , |
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| Lenguaje: | eng |
| Publicado: |
Academic Press
1994
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1992121 |