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Fundamentals of semiconductor processing technology
The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal...
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| Lenguaje: | eng |
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Springer
1995
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| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4615-2209-6 http://cds.cern.ch/record/2006411 |