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Handbook of optical metrology: principles and applications
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
CRC Press
2015
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2022003 |
| _version_ | 1780946956818841600 |
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| author | Yoshizawa, Tōru |
| author_facet | Yoshizawa, Tōru |
| author_sort | Yoshizawa, Tōru |
| collection | CERN |
| id | cern-2022003 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2015 |
| publisher | CRC Press |
| record_format | invenio |
| spelling | cern-20220032021-04-21T20:15:36Zhttp://cds.cern.ch/record/2022003engYoshizawa, TōruHandbook of optical metrology: principles and applicationsOther Fields of PhysicsCRC Pressoai:cds.cern.ch:20220032015 |
| spellingShingle | Other Fields of Physics Yoshizawa, Tōru Handbook of optical metrology: principles and applications |
| title | Handbook of optical metrology: principles and applications |
| title_full | Handbook of optical metrology: principles and applications |
| title_fullStr | Handbook of optical metrology: principles and applications |
| title_full_unstemmed | Handbook of optical metrology: principles and applications |
| title_short | Handbook of optical metrology: principles and applications |
| title_sort | handbook of optical metrology: principles and applications |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/2022003 |
| work_keys_str_mv | AT yoshizawatoru handbookofopticalmetrologyprinciplesandapplications |