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Microstructuring of glasses
As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2008
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-3-540-49888-9 http://cds.cern.ch/record/2023384 |