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Metal semiconductor contacts and devices

VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization t...

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Detalles Bibliográficos
Autores principales: Cohen, Simon S, Gildenblat, Gennady Sh, Einspruch, Norman G
Lenguaje:eng
Publicado: Academic Press 1986
Materias:
Acceso en línea:http://cds.cern.ch/record/2031823
Descripción
Sumario:VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization techniques in the development of practical metal-semiconductor contacts and devices.This volume contains chapters that are devoted to the discussion of the physics of metal-semiconductor interfaces and its basic phenomena; fabrication procedures; and interface characterization techniques, particularl