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Metal semiconductor contacts and devices
VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization t...
Autores principales: | , , |
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Lenguaje: | eng |
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Academic Press
1986
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Acceso en línea: | http://cds.cern.ch/record/2031823 |