Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering

In the context of the HIE-ISOLDE upgrade at CERN, several new facilities for the niobium sputter coating of QWR-type superconducting RF accelerating cavities have been developed, built, and successfully operated. In order to further optimize the production process of these cavities the magnetron spu...

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Autores principales: Sublet, A, Aviles, I, Calatroni, S, D'Elia, A, Jecklin, N, Mondino, I, Prunet, S, Therasse, M, Venturini Delsolaro, W, Zhang, P
Lenguaje:eng
Publicado: 2013
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2062883
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author Sublet, A
Aviles, I
Calatroni, S
D'Elia, A
Jecklin, N
Mondino, I
Prunet, S
Therasse, M
Venturini Delsolaro, W
Zhang, P
author_facet Sublet, A
Aviles, I
Calatroni, S
D'Elia, A
Jecklin, N
Mondino, I
Prunet, S
Therasse, M
Venturini Delsolaro, W
Zhang, P
author_sort Sublet, A
collection CERN
description In the context of the HIE-ISOLDE upgrade at CERN, several new facilities for the niobium sputter coating of QWR-type superconducting RF accelerating cavities have been developed, built, and successfully operated. In order to further optimize the production process of these cavities the magnetron sputtering technique has been further investigated and continued as an alternative to the already successfully operational DC bias diode sputtering method. The purpose of this poster is to present the results obtained with this technique. The Nb thickness profile along the cavity and its correlation with the electro-magnetic field distribution inside the cavity are discussed. Film structure, morphology and Residual Resistivity Ratio (RRR) will be considered as well and compared with films obtained by DC bias diode sputtering. Finally these results will be compared with RF measurement of a production-like magnetron-coated cavity.
id cern-2062883
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2013
record_format invenio
spelling cern-20628832022-08-17T13:32:09Zhttp://cds.cern.ch/record/2062883engSublet, AAviles, ICalatroni, SD'Elia, AJecklin, NMondino, IPrunet, STherasse, MVenturini Delsolaro, WZhang, PPreliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron SputteringXXIn the context of the HIE-ISOLDE upgrade at CERN, several new facilities for the niobium sputter coating of QWR-type superconducting RF accelerating cavities have been developed, built, and successfully operated. In order to further optimize the production process of these cavities the magnetron sputtering technique has been further investigated and continued as an alternative to the already successfully operational DC bias diode sputtering method. The purpose of this poster is to present the results obtained with this technique. The Nb thickness profile along the cavity and its correlation with the electro-magnetic field distribution inside the cavity are discussed. Film structure, morphology and Residual Resistivity Ratio (RRR) will be considered as well and compared with films obtained by DC bias diode sputtering. Finally these results will be compared with RF measurement of a production-like magnetron-coated cavity.oai:cds.cern.ch:20628832013
spellingShingle XX
Sublet, A
Aviles, I
Calatroni, S
D'Elia, A
Jecklin, N
Mondino, I
Prunet, S
Therasse, M
Venturini Delsolaro, W
Zhang, P
Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering
title Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering
title_full Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering
title_fullStr Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering
title_full_unstemmed Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering
title_short Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering
title_sort preliminary results of nb thin film coating for hie-isolde srf cavities obtained by magnetron sputtering
topic XX
url http://cds.cern.ch/record/2062883
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