NB Coating Developments with HIPIMS for SRF Applications

In the last few years the interest of the thin film science and technology community on High Impulse Power Magnetron Sputtering (HIPIMS) coatings has steadily increased. HIPIMS literature shows that better thin film morphology, denser and smoother films can be achieved when compared with standard dc...

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Detalles Bibliográficos
Autores principales: Terenziani, G, Calatroni, S, Junginger, T, Santillana, I A, Ehiasarian, A P
Lenguaje:eng
Publicado: 2013
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2063908
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author Terenziani, G
Calatroni, S
Junginger, T
Santillana, I A
Ehiasarian, A P
author_facet Terenziani, G
Calatroni, S
Junginger, T
Santillana, I A
Ehiasarian, A P
author_sort Terenziani, G
collection CERN
description In the last few years the interest of the thin film science and technology community on High Impulse Power Magnetron Sputtering (HIPIMS) coatings has steadily increased. HIPIMS literature shows that better thin film morphology, denser and smoother films can be achieved when compared with standard dc Magnetron Sputtering (dcMS) coating technology [1]. Furthermore the capability of HIPIMS to produce a high quantity of ionized species [2,3] can allow conformal coatings also for complex geometries. A study is under way at CERN to apply this technology for the Nb coating of SRF 1.3-1.5 GHz Cu cavities, and in parallel at SHU the plasma physics and its correlation with film morphology are being investigated [2]. Recent results achieved with this technique are presented in the paper.
id cern-2063908
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2013
record_format invenio
spelling cern-20639082022-08-17T13:32:46Zhttp://cds.cern.ch/record/2063908engTerenziani, GCalatroni, SJunginger, TSantillana, I AEhiasarian, A PNB Coating Developments with HIPIMS for SRF ApplicationsXXIn the last few years the interest of the thin film science and technology community on High Impulse Power Magnetron Sputtering (HIPIMS) coatings has steadily increased. HIPIMS literature shows that better thin film morphology, denser and smoother films can be achieved when compared with standard dc Magnetron Sputtering (dcMS) coating technology [1]. Furthermore the capability of HIPIMS to produce a high quantity of ionized species [2,3] can allow conformal coatings also for complex geometries. A study is under way at CERN to apply this technology for the Nb coating of SRF 1.3-1.5 GHz Cu cavities, and in parallel at SHU the plasma physics and its correlation with film morphology are being investigated [2]. Recent results achieved with this technique are presented in the paper.oai:cds.cern.ch:20639082013
spellingShingle XX
Terenziani, G
Calatroni, S
Junginger, T
Santillana, I A
Ehiasarian, A P
NB Coating Developments with HIPIMS for SRF Applications
title NB Coating Developments with HIPIMS for SRF Applications
title_full NB Coating Developments with HIPIMS for SRF Applications
title_fullStr NB Coating Developments with HIPIMS for SRF Applications
title_full_unstemmed NB Coating Developments with HIPIMS for SRF Applications
title_short NB Coating Developments with HIPIMS for SRF Applications
title_sort nb coating developments with hipims for srf applications
topic XX
url http://cds.cern.ch/record/2063908
work_keys_str_mv AT terenzianig nbcoatingdevelopmentswithhipimsforsrfapplications
AT calatronis nbcoatingdevelopmentswithhipimsforsrfapplications
AT jungingert nbcoatingdevelopmentswithhipimsforsrfapplications
AT santillanaia nbcoatingdevelopmentswithhipimsforsrfapplications
AT ehiasarianap nbcoatingdevelopmentswithhipimsforsrfapplications

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