Thin Film Coating Optimization For HIE-ISOLDE SRF Cavities: Coating Parameters Study and Film Characterization

The HIE-ISOLDE project at CERN requires the production of 32 superconducting Quarter Wave Resonators (QWRs) in order to increase the energy of the beam up to 10 MeV/u. The cavities, of complex cylindrical geometry (0.3m diameter and 0.8m height), are made of copper and are coated with a thin superconducting layer of niobium. In the present phase of the project the aim is to obtain a niobium film, using the DC bias diode sputtering technique, providing adequate high quality factor of the cavities and to ensure reproducibility for the future series production. After an overview of the explored coating parameters (hardware and process), the resulting film characteristics, thickness profile along the cavity, structure and morphology and Residual Resistivity Ratio (RRR) of the Nb film will be shown. The effect of the sputtering gas process pressure and configuration of the coating setup will be highlighted.