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Advances in research and development: modeling of film deposition for microelectronic applications
Significant progress has occurred during the last few years in device technologies and these are surveyed in this new volume. Included are Si/(Si-Ge) heterojunctions for high-speed integrated circuits, Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, III-V quantum-well detector s...
Autores principales: | , |
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Lenguaje: | eng |
Publicado: |
Elsevier Science
1997
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2116502 |
Sumario: | Significant progress has occurred during the last few years in device technologies and these are surveyed in this new volume. Included are Si/(Si-Ge) heterojunctions for high-speed integrated circuits, Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, III-V quantum-well detector structures operated in the heterodyne mode for high-data-rate communications, and III-V heterostructures and quantum-wells for infrared emissions. |
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