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Advances in research and development: modeling of film deposition for microelectronic applications
Significant progress has occurred during the last few years in device technologies and these are surveyed in this new volume. Included are Si/(Si-Ge) heterojunctions for high-speed integrated circuits, Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, III-V quantum-well detector s...
| Autores principales: | , |
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| Lenguaje: | eng |
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Elsevier Science
1997
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| Acceso en línea: | http://cds.cern.ch/record/2116502 |