Development of large area resistive electrodes for ATLAS NSW MicroMEGAS

MicroMegas with resistive anode will be used for the NSW upgrade of the ATLAS experiment at LHC. The resistive electrode is one of key technology for MPGDs to prevent sparks. Large area resistive electrodes for the MM have been developed using two different technology; screen printing and carbon sputtering. Maximum size of each resistive foil is 45cm x 220cm with printed pattern of 425 micron pitch strips. Those technologies are also suitable to mass production. The prototypes of series production model have been produced successfully. We will report the development and production status and test results of the resistive MicroMegas.