SEM microcharacterization of semiconductors

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron b...

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Detalles Bibliográficos
Autores principales: Holt, D B, Joy, D C
Lenguaje:eng
Publicado: Academic Press 1989
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/2121407
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author Holt, D B
Joy, D C
author_facet Holt, D B
Joy, D C
author_sort Holt, D B
collection CERN
description Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.
id cern-2121407
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1989
publisher Academic Press
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spelling cern-21214072021-04-21T19:55:25Zhttp://cds.cern.ch/record/2121407engHolt, D BJoy, D CSEM microcharacterization of semiconductorsEngineeringApplications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.Academic Pressoai:cds.cern.ch:21214071989
spellingShingle Engineering
Holt, D B
Joy, D C
SEM microcharacterization of semiconductors
title SEM microcharacterization of semiconductors
title_full SEM microcharacterization of semiconductors
title_fullStr SEM microcharacterization of semiconductors
title_full_unstemmed SEM microcharacterization of semiconductors
title_short SEM microcharacterization of semiconductors
title_sort sem microcharacterization of semiconductors
topic Engineering
url http://cds.cern.ch/record/2121407
work_keys_str_mv AT holtdb semmicrocharacterizationofsemiconductors
AT joydc semmicrocharacterizationofsemiconductors

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