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Handbook of ion beam processing technology: principles, deposition, film modification and synthesis
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
William Andrew
1989
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2121581 |
| _version_ | 1780949379250651136 |
|---|---|
| author | Cuomo, Jerome J Rossnagel, Stephen M Kaufman, Harold R |
| author_facet | Cuomo, Jerome J Rossnagel, Stephen M Kaufman, Harold R |
| author_sort | Cuomo, Jerome J |
| collection | CERN |
| id | cern-2121581 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1989 |
| publisher | William Andrew |
| record_format | invenio |
| spelling | cern-21215812021-04-21T19:55:05Zhttp://cds.cern.ch/record/2121581engCuomo, Jerome JRossnagel, Stephen MKaufman, Harold RHandbook of ion beam processing technology: principles, deposition, film modification and synthesisEngineeringWilliam Andrewoai:cds.cern.ch:21215811989 |
| spellingShingle | Engineering Cuomo, Jerome J Rossnagel, Stephen M Kaufman, Harold R Handbook of ion beam processing technology: principles, deposition, film modification and synthesis |
| title | Handbook of ion beam processing technology: principles, deposition, film modification and synthesis |
| title_full | Handbook of ion beam processing technology: principles, deposition, film modification and synthesis |
| title_fullStr | Handbook of ion beam processing technology: principles, deposition, film modification and synthesis |
| title_full_unstemmed | Handbook of ion beam processing technology: principles, deposition, film modification and synthesis |
| title_short | Handbook of ion beam processing technology: principles, deposition, film modification and synthesis |
| title_sort | handbook of ion beam processing technology: principles, deposition, film modification and synthesis |
| topic | Engineering |
| url | http://cds.cern.ch/record/2121581 |
| work_keys_str_mv | AT cuomojeromej handbookofionbeamprocessingtechnologyprinciplesdepositionfilmmodificationandsynthesis AT rossnagelstephenm handbookofionbeamprocessingtechnologyprinciplesdepositionfilmmodificationandsynthesis AT kaufmanharoldr handbookofionbeamprocessingtechnologyprinciplesdepositionfilmmodificationandsynthesis |