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Process technology for silicon carbide devices
Autor principal: | |
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Lenguaje: | eng |
Publicado: |
IET
2001
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2121613 |
_version_ | 1780949380519428096 |
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author | Zetterling, Carl-Mikael |
author_facet | Zetterling, Carl-Mikael |
author_sort | Zetterling, Carl-Mikael |
collection | CERN |
id | cern-2121613 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2001 |
publisher | IET |
record_format | invenio |
spelling | cern-21216132021-04-21T19:55:03Zhttp://cds.cern.ch/record/2121613engZetterling, Carl-MikaelProcess technology for silicon carbide devicesEngineeringIEToai:cds.cern.ch:21216132001 |
spellingShingle | Engineering Zetterling, Carl-Mikael Process technology for silicon carbide devices |
title | Process technology for silicon carbide devices |
title_full | Process technology for silicon carbide devices |
title_fullStr | Process technology for silicon carbide devices |
title_full_unstemmed | Process technology for silicon carbide devices |
title_short | Process technology for silicon carbide devices |
title_sort | process technology for silicon carbide devices |
topic | Engineering |
url | http://cds.cern.ch/record/2121613 |
work_keys_str_mv | AT zetterlingcarlmikael processtechnologyforsiliconcarbidedevices |