Cargando…
Biased HiPIMS technology for superconducting rf accelerating cavities coating
In the last few years the interest of the thin film science and technology community on High Impulse Power Magnetron Sputtering (HIPIMS) coatings has steadily increased. HIPIMS literature shows that better thin film morphology, denser and smoother films can be achieved when compared with standard dc...
| Autores principales: | , , , , , , |
|---|---|
| Formato: | info:eu-repo/semantics/article |
| Lenguaje: | eng |
| Publicado: |
2016
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2155295 |