Introduction to semiconductor manufacturing technology

IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. [i]Introduction to Semiconductor Manufacturing Technologies, Second Edition[/i] thoroughly describes the complicated...

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Detalles Bibliográficos
Autor principal: Society of Photo-Optical Instrumentation Engineers (SPIE)
Lenguaje:eng
Publicado: Society of Photo-Optical Instrumentation Engineers (SPIE) 2012
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/2222478

Internet

http://cds.cern.ch/record/2222478

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